3D MEMS and IC Integration

Title3D MEMS and IC Integration
Publication TypeConference Paper
Year of Publication2008
AuthorsTaklo, M. M. V., Lietaer N., Tofteberg H. R., Sepp T., Prainsack J., Weber J., & Ramm P.
Conference NameSymposium E: Materials and Technologies for 3-D Integration
Volumen/a
Pages1 - 8
Date PublishedDec
URLhttp://www.mrs.org/s_mrs/sec_subscribe.asp?CID=16750&DID=231831&action=detail
Citation KeyID46351