3D Integration of MEMS and IC: Design, Technology and Simulations book title: Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Title3D Integration of MEMS and IC: Design, Technology and Simulations book title: Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Publication TypeBook Chapter
Year of Publication2010
AuthorsTaklo, M., Schjølberg-Henriksen K., Lietaer N., Prainsack J., Elfving A., Weber J., Klein M., Schneider P., & Reitz S.
Series TitleNATO Science for Peace and Security Series B: Physics and Biophysics
Volume3
Pages191 - 203
Publishern/a
CitySpringer Netherlands
ISBN Number978-90-481-3805-0
Citation KeyID50248